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Dr. Hesketh, his students, and colleagues, have contributed an enormous amount to the advancement of the MEMS field. The following is an extensive (but not exhaustive) list of the publications associated with Dr. Hesketh. For the specific publications of each student in the lab, please refer to the personal web pages.

Published Books and Parts of Books

  1. Contributed problems sets to each chapter of "The Physics of Micro/Nano Fabrication," by I. Brodie and J. J. Muray, published by Plenum, (1992).
  2. P. J. Hesketh, J. N. Zemel, and H. G. Hughes, (Editors) "Microstructures and Microfabricated Systems," Softbound Proceedings of the ECS, Vol. 94-14 (The Electrochemical Society, New Jersey, 1994).
  3. D. Denton, P. J. Hesketh, and H. G. Hughes, (Editors) "Microstructures and Microfabricated Systems - II," Hardbound Proceedings of the ECS, Vol. 95-27 (The Electrochemical Society, New Jersey, 1995).
  4. V. E. Borisenko and P. J. Hesketh, Solid State Rapid Thermal Processing of Semiconductors, (Plenum, New York, 1997).
  5. P. J. Hesketh, H. Hughes, and G. Barna (Editors) "Microstructures and Microfabricated Systems - III," Hardbound Proceedings of the ECS, PV. 97-5, (The Electrochemical Society, New Jersey, 1997).
  6. P. J. Hesketh, S. Zivanovic, S. Pak, B. Ilic, L. St.Clair, B. Shih, K.Y. Chung, J. C. Cunneen, S. Cariffini, J. G. Boyd, J. R. Stetter, And S. M. Lunte And G. S. Wilson, "Biosensors and Microfluidic Systems," in Tribology in MEMS, Ed. B. Bhushan, Kluwer Science Publications, (1998).
  7. P. J. Hesketh, H. G. Hughes, and W. E. Bailey (Editors) "Microstructures and Microfabricated Systems - IV," Hardbound Proceedings of the ECS, PV. 98-14, (The Electrochemical Society, New Jersey, 1998).
  8. P. J. Hesketh, “Micromachining,” chapter 10 in The VLSI Handbook, pp. 1001-1071, (CRC Press, Boca Raton, FL 2000).
  9. S.S. Ang, W.E. Bailey, J.L. Davidson, P.J. Hesketh, H.G. Hughes, and D. Misra, Microfabricated Systems and MEMS – V, Hardbound Proceedings of the ECS, PV. 2000-19, (The Electrochemical Society, New Jersey, 2000).
  10. Provided problem sets to M. J. Madou for new edition of Micro and Nano Machining Technology, CRC Press, Boca Raton, FL, 2001.
  11. P.J. Hesketh, S.S. Ang, J.L. Davidson, H.G. Hughes, and D. Misra, Microfabricated Systems and MEMS – VI, Hardbound Proceedings of the ECS, PV. 2002-6 , (The Electrochemical Society, New Jersey, 2002).
  12. R. P. Manginell, J. T. Borenstein, L. P. Lee, and P. J. Hesketh, BioMEMS and Bionanotechnology, Symposium Proceedings of the MRS, Vol. 729, Spring 2002.
  13. P.J. Hesketh and J.R. Stetter, “Micro and Nano Chemical Sensors Design and Fabrication,” in preparation, Kleuer/Plenum Publishers, 2004.
  14. P. J. Hesketh, “Microvalves for Fuel Cells, MicroGas Chromatography and Miniature Bioanalysis Systems,” Critical Update on Sensor and Microsystems, VCH, 2004.
  15. P.J. Hesketh, J.L. Davidson, H.G. Hughes, and D. Misra, Microfabricated Systems and MEMS – VII, Hardbound Proceedings of the ECS, in preparation (The Electrochemical Society, New Jersey, 2004).


Refereed Publications

Peer Review Journal Papers
  1. P. J. Hesketh, B. Gebhart, and J. N. Zemel, "Heat transfer model for the pyroelectric anemometer," J. Appl. Phy., 57, 4944-4949 (1985).
  2. P. J. Hesketh, B. Gebhart, and J. N. Zemel, "Organ pipe radiant modes of periodic micromachined silicon surfaces," Letter to Nature, 324, 549-551 (1986).
  3. P. J. Hesketh, B. Gebhart, and J. N. Zemel, "Measurements of the spectral and directional emission from microconfigured silicon surfaces," J. Heat Transfer, 110, 680-686 (1988).
  4. P. J. Hesketh, J. N. Zemel, and B. Gebhart, "Polarized spectral emittance from periodic micromachined surfaces. I Doped silicon: the normal direction," Physical Review B, 37, 795-802 (1988).
  5. P. J. Hesketh, J. N. Zemel, and B. Gebhart, "Polarized spectral emittance from periodic micromachined surfaces. II. Doped silicon: angular variation," Physical Review B, 37, 803-813 (1988).
  6. Chishein Ju, P. J. Hesketh, "Measurements of the Anisotropic Etching of Silicon in Aqueous Cesium Hydroxide," Sensors and Actuators, A33, 191 (1992).
  7. Chishein Ju, P. J. Hesketh, "High Index Plane Selectivity of Silicon Anisotropic Etching in Aqueous Cesium Hydroxide and Potassium Hydroxide," Thin Solid Films, 225, 58 (1992).
  8. B. Kasapbasioglu, P. J. Hesketh, W. C. Hanly, G. J. Maclay, and R. N. Esfahani, "A Novel Ultra-Thin Film Glucose Sensor," Sensors and Actuators, 14, 749-751 (1993).
  9. P. J. Hesketh, Chishein Ju, Sanjay Gowda, Elmer Zanoria, and Steven Danyluk, "A Surface Free Energy Model of Silicon Anisotropic Etching," Journal of the Electrochemical Society, 140, 1080-1085 (1993).
  10. H. Kasapbasioglu, P. J. Hesketh, and A. Macrander, "Etching Techniques for the Fabrication of a Silicon X-Ray Analyzer," Journal of the Electrochemical Society, 140, 2319-2323 (1993).
  11. Zikang Pan, P. J. Hesketh, and G. J. Maclay, "Novel Embedded Capacitive Sensors for Monitoring the Cure of Polyimide in Multi-Chip Modules," Journal of Vacuum Science and Technology. 11 (4), 1396-1400 (1993).
  12. Yu-Cheng Lin, J. P. Schuster and P. J. Hesketh, "FEA of thermal stresses in a silicon pressure sensor," Sensors and Actuators, 44 (2), 145-149 (1994).
  13. ChunShien Li, P. J. Hesketh, G. J. Maclay, "Thin Gold Film Strain Gauges," Journal of Vacuum Science and Technology, A 12 (3), 813-819 (1994).
  14. Tong Wang, Swatee Surve, and P. J. Hesketh, "Silicon Anisotropic Etching in Rubidium Hydroxide," J. Electrochem. Soc. 141 (9), 2493-2497 (1994).
  15. P. J. Hesketh and J. D. Harrison "Micromachining - The Fabrication of Microstructures and Microsensors," Invited paper Interfaces, 3 (4), 21-26 (December 1994).
  16. Shiming Yao, A. T. Macrander, and P. J. Hesketh, "Etching High Aspect Ratio (110) Silicon Grooves in CsOH," J. Electrochem. Soc. 142 (2), L23 (1994).
  17. M. DeSilva, Yu Zhang, P. J.. Hesketh, G. J. Maclay, S. Gendel, and J. R. Stetter, "A Novel Biosensor for Staphylococcal Enterotoxin," Biosensors & Bioelectronics. 10, 675-682 (1995).
  18. S. K. Hardeman, D. Beirne, T. Nelson, M. DeSilva, Yu Zhang, P. J. Hesketh, G. J. Maclay, S. M. Gendel, and J. R. Stetter "Sensitivity of novel ultrathin platinum film biosensor to buffer ionic strength," Sensors & Actuators B 24 (1-3), 98-102 (1995).
  19. Chang-Dong Feng, YuDong Ming, P. J. Hesketh, S. M. Gendel, J. R. Stetter, "Confirmation of immobilizing IgG on different surfaces with AFM and impedance investigations of a Pt electrode during the immobilization," Sensors and Actuators B, 35, 431-434 (1996).
  20. P. J. Hesketh, J. G. Boyd, M. J. McNallan, and G. J. Maclay, “Curriculum development in MEMS,” Interface. 6 (1), 48-51 (Spring, 1997).
  21. J. Cunneen, Yu-Cheng Lin, S. Caraffini, J. G. Boyd, P. J. Hesketh, S. M. Lunte and G. S. Wilson, "A Positive Displacement Micropump for Microdialysis" " Mechatronics Journal, 8, 561-583 (1998).
  22. P. Vavassori, V. Matlushko, R. M. Osgood III, M. Grimsditch, U. Welp, G. Crabtree, W. Fan, S. R. J. Brueck, B. Ilic, and P. J. Hesketh, “Magnetic information in the light diffracted by a negative dot array of Fe,” Physical Rev. B. 59 (9), 6337-6343 (1999).
  23. V. Metlushko, U. Welp, G. W. Crabtree, R. Osgood, S. D Bader, L. E. DeLong, Z. Ahang, S. R. J. Brueck, B. Illic, K. Chung, and P. J. Hesketh, "Interstitial flux Phases in a Superconducting Niobium Film with a Square Lattice of Artificial Pinning Centers," Physical Rev. B., 60, (18), 585-588 (1999).
  24. M. Capanu, J. G. Boyd, P. J. Hesketh and E. Enikov, “Design and Fabrication of an Electromagnetically Actuated Bistable Microvalve,” Journal of Microelectromechanical Systems, 9, (2), 181-189 (2000).
  25. T. Stanczyk, J. G. Boyd, P. J. Hesketh, M. Capanu, “A microfabricated electrochemical actuator for large displacements, “Journal of Microelectromechanical Systems, 9, 314-320 (2000).
  26. S. C. Pak, P. J. Hesketh, and W. R. Penrose, "An ultrathin platinum film sensor to measure biomolecular binding," Biosensors and Bioelectronics, 16, 371-379 (2001).
  27. L. Seals, L. A. Tse, P. J. Hesketh and J. L. Gole, “Rapid, reversible, sensitive porous silicon gas sensor,” Journal of Applied Physics, 91, 2519-2523 (2001).
  28. H. S. Noh, P. J. Hesketh, and G. Frye-Mason “Fabrication of parylene columns for microfluidics,” Journal of Microelectromechanical Systems, 11 (6) 718-725 (2002).
  29. A. L. Tse, P. J. Hesketh, J. L. Gole, and D. W. Rosen, “Rapid prototyping of chemical sensor packages with stereolithography,” 9, Microsystems Technology, 319-323 (2003).
  30. M. Moorman, P, J. Hesketh, Jiantao Zheng, and S. Danyluk, “A Novel, Micro- Contact Potential Difference Probe,” in press Sensors and Actuators, 2004.
  31. J. H. Thomas, Sang Kyung Kim, P. J. Hesketh, H. B. Halsall, W. R. Heineman, “Microbead-based Electrochemical Immunoassay with Interdigitated Array Electrodes,” submitted to Analytical Biochemistry, 2004.
  32. Hong-Seok Noh, Yong Huang, and Peter J. Hesketh, "Parylene Micromolding, a Rapid and Low-cost Fabrication Method of Parylene Microchannel." Submitted to Sensors and Actuators B.
  33. Hua Mao, Hong-seok Noh, Sangkyung Kim, Peter J. Hesketh and Lid Wong, “Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing,” submitted to IEEE Trans of Biomedical Engr.
Peer Reviewed Conference Proceedings Papers
  1. J. N. Zemel, J. R. Frederick, P. J. Hesketh, and B. Gebhart, "Pyroelectric Anemometry," Proceedings of the 4th sensor Symposium, Tokyo, Japan, Institute of Electrical Engineers of Japan, pp. 1-8, June, 1984.
  2. P. J. Hesketh, B. Gebhart, and J. N. Zemel,, "Anomalous emissivity from periodic micromachined silicon surfaces," Technical Digest of the Solid State Sensors Workshop, Hilton Head, North Carolina, IEEE, Paper #13 (4 pages), June, 1986.
  3. P. J. Hesketh, B. Gebhart, J. N. Zemel, "Radiant emission characteristics of regularly microconfigured surfaces," Proceedings of the International Symposium on Cooling Technology for Electronic Equipment, Honolulu, Hawaii, The Pacific Institute for Thermal Engineering, pp. 68-81, March, 1987.
  4. P. J. Hesketh, M. Gerber, J. Joseph and K. Wulff, "Thermal stability of thin film thermopiles," Third International Meeting on Chemical Sensors, Cleveland, Ohio, pp. 389-392, September, 1990.
  5. P. J. Hesketh, M. J. Madou, T. Otagawa, J. Joseph, and J. N. Nikolchev, "The application of Micromachining to Biomedical Sensors," Sensors Expo 90, Chicago, Illinois, pp. 305D1-305D8, September, 1990.
  6. P. J. Hesketh and G. J. Maclay, "Micromachining for Chemical and Biosensors," Sensors Expo 91, Chicago, Illinois, pp. 102C1-102C6, September, 1991.
  7. B. Kasapbasioglu, P. J. Hesketh, W. C. Hanly, and G. J. Maclay, "A Platinum Island Film Glucose Sensor," 4th International Meeting on Chemical Sensors, Tokyo, Japan, pp. 840-841, September, 1992.
  8. T. Nelson and P. J. Hesketh, "Microfabrication of Highly Porous Polymer Membranes," IEEE Bioengineering Conference, San Diego, pp. 1567-1568, October, 1993.
  9. S. Hardeman, T. Nelson, D. Beirne, M. DeSilva, P. J. Hesketh, G. J. Maclay, and S. Gendel, "Sensitivity of a Novel Ultrathin Platinum Film Immunosensor to Buffer Ionic Strength," 5th International Meeting on Chemical Sensors, Rome, Italy, July, 1994, p.
  10. J. R. Stetter, Yu Zhang, M. DeSilva, P. J. Hesketh, G. J. Maclay, and S. M. Gendel, "An Antibody-Based Biosensor for Staphylococcus Enterotoxin B [SEB]," 5th International Meeting on Chemical Sensors, Rome, Italy, p. 83, July, 1994.
  11. Chang-Dong Feng, T. E. Nelson, S. Hardman, P. J. Hesketh, G. J. Maclay, S. M. Gendel, and J. R. Stetter, "Impedance analysis of ultrathin platinum film immunosensors with different thickness and macrogeometry," Proceedings of Transducers '95, Stockholm, Sweden, pp. 538-541, June, 1995..
  12. P. J. Hesketh, Yu-Cheng Lin, Yangqing Pu, and Yudong Ming, "MEMS: Silicon Technology for Sensors and Actuators," Proceedings of the Sensors Expo'95, September, Chicago, IL (Helmers Publishing, Peterborough, NH) pp. 165-174, 1995.
  13. Chang-Dong Feng, Yu-Dong Ming, C. W. Hanly, P. J. Hesketh, G. J. Maclay, S. M. Gendel, and J. R. Stetter, "Confirmation of immobilizing IgG on different surfaces with AFM and development of impedance based immunosensors," Proceedings of 6th International Meeting on Chemical Sensors, Washington, DC, pg. 189, July, 1996.
  14. S. Zivanovic, Chang-Dong Feng, Yu-Dong Ming, C. W. Hanly, P. J. Hesketh, W. R. Penrose, and J. R. Stetter, "Efficient method for screening ultrathin metal sensor with largest biological response," Proceedings of 6th International Meeting on Chemical Sensors, Washington, DC, pg. 258, July, 1996.
  15. P. J. Hesketh and G. J. Maclay, "Microsensors and Microfabricated Systems", Résumés/Abstracts, Union Radio-Scientifique Internationale, Lille, France, pg.624, August-September 1996.
  16. Peter Hesketh, Yu-Cheng Lin, Stevan Zivanovic, Yudong Ming, James Cunneen, Simone Caraffini, James Boyd, Joseph Stetter, S. M. Lunte and G. S. Wilson, "Biosensors and microfluidic systems," International Aerospace Symposium '96 Nagoya, Japan, pp. 129-135, December, 1996.
  17. P. J. Hesketh, J. Cunneen, S. Caraffini, J. G. Boyd, S. M. Lunte and G. S. Wilson, "A positive displacement micropump for microfluidic systems," ASME Symposium on Microelectromechanical Systems, Chicago, August, 1997.
  18. P. J. Hesketh, J. G. Boyd, M. J. McNallan, G. J. Maclay, and C. Takoudis, “Integration of MEMS courses into an engineering curriculum,” Proceedings of the ICE conference on Engineering Education, pg. 120-132, August, 1997.
  19. P. J. Hesketh, S. Zivanovic, S.,Y. Ming, S. C. Pak, S. Svojanovsky, J. C. Cunneen, S. Caraffini, J. G. Boyd, J.R. Stetter, S.M. Lunte, and G.S. Wilson, “Microfabricated Biosensors and Microsystems,” Proceedings of the 21st International Conference on Microelectronics, (MIEL'97) Nis˜ , Yugoslavia, pp.63-69, 14-17th September, 1997.
  20. P. J. Hesketh, Yangquing Pu and Jaihui Ji, "Silicon anisotropic etching in KOH, KOH/alcohol and CsOH solutions," Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, Holten, The Netherlands, pg. May, 1998.
  21. P. J. Hesketh, "Micromachining of Sensors and Fluidic Devices," 2nd International Symposium on Electrochemical Microsystems Technologies, Wasada University, Tokyo, Japan, September, 1998.
  22. V. Metlushko, U. Welp, G. Crabtree, Z. Zhang, S.R.J. Brueck, B. Watkins, L.E. Delong, B. Ilic, K. Chung, and P. J. Hesketh, "Periodic arrays of pinning centers I thin Vanadium films," in Superconducting Superlattices II: Native and Artificial, Eds. I. Bozovic, and D. Pavuna, Proceedings SPIE, Vol. 3480, pp149-158 (1998).
  23. C. C. Wong, D. R. Adkins, R. P. Manginell, T. Stanczyk, P. J. Hesketh and G. C. Frye-Mason, “Development of a Latching Valve for Micro-Chem-LabTM,” IMECE, ASME, (1999).
  24. P. J. Hesketh, “Microfluidic Systems,” Proceedings of the First Cross-Strait Symposium on Microsystem Technology, May 17-20th, Tainan, Taiwan, R.O.C. 2000.
  25. E. L. H. Heintz, C. Kranz, B. Mizaikoff, H.-S. Noh, P. J. Hesketh, A. Lugstein, and E. Bertagnolli, “Characterization of Parylene Coated Combined Scanning Probe Tips for In-Situ Electrochemical and Topographical Imaging,” Proceedings of the IEEE NanoTechnology Conference, Maui, HI, 2001, pg. 105-110.
  26. Hong-Seok Noh, P. J. Hesketh, and G. C. Frye-Mason, “Heating Element Embedded Parylene Microcolumn For Miniature Gas Chromatograph,” Proceedings of MEMS’02, IEEE, Las Vegas, February, 2002, pg.
  27. Sang Kyung Kim and P. J. Hesketh, “Microbead-based Electrochemical Immunoassay System with Comb Interdigitated Arrays (IDA)” MEMS’03, Kyoto, January, 2003, pg.
  28. Hong-Seok Noh, Yoonsu Choi, Chi-fu Wu, P. J. Hesketh, and Mark G. Allen, “Rapid, Low-Cost Fabrication of Parylene Microchennels for Microfluidic Applications,” Proceedings of Transducers’03, Boston, June, 2003, pg.
  29. Hong-seok Noh, Sangkyung Kim, Peter J. Hesketh, Hua Mao, and Lid Wong, “Miniature Corrugated Diaphragm for Fiber-Optic-Linked Pressure Sensing,” Proceedings of ASME International Mechanical Engineering Congress & Exposition, Washington, D.C., November 16-21, 2003, pg.
  30. J. S. Bintoro and, P. J. Hesketh, “A Bistable Electromagnetic Actuated Microvalve with Integrated Switching Mechanism,” Proceedings of ASME International Mechanical Engineering Congress & Exposition, Washington, D.C., November 16-21, 2003, pg.
  31. J. S. Bintoro, R. Luharuka, and P. J. Hesketh, “A Complete Structure of a Bistable Electromagnetic Actuated Microvalve Fabricated on a Single Wafer, Packages with Stereolithography and PDMS,” Proceedings of ASME International Mechanical Engineering Congress & Exposition, Washington, D.C., November 16-21, 2003, pg.


Other Publications

Reports and Technical Memorandum
  1. P. J. Hesketh, "Comparison of 10/8 and 8/6 codebook codes with Miller squared codes for an Ampex 331 disk drive," Technical Memorandum for the BBC Research Department Studio Group, #PH-1622, 1980.
  2. P. J. Hesketh, "The design of a right ventricle absolute blood pressure sensor," Final Report for SRI International project #4004, 1988.
  3. P. J. Hesketh, "Thermopiles," Final report for SRI International project 6102, 1988.
  4. G. B. Andeen, P. J. Hesketh, and C. Holland, "Novel concepts for high resolution pressure measurement," Final report for SRI International project #6135, 1989.
  5. H. Kasapbasioglu and P. J. Hesketh, "Silicon etching with KOH," EECS Dept. UIC, Technical Report, #UIC-EECS-91-3, February, 1991.
  6. Zikang Pan, P. J. Hesketh, and G. J. Maclay, "Embedded Capacitive Sensors for Multi-Chip Module Manufacturing Process Monitoring," Final Report for MRC Project, December, 1992.
  7. ChunShien Li, P. J. Hesketh, and G. J. Maclay, "Ultrathin Film Strain Gauges," Final Report form MRC Project, August, 1993.
  8. Chi-Fu Wu and P. J. Hesketh, “Miniature fluid pumping for fuel cells,” Annual Report to T/J Technology, December, 2002.


Presentations

Refereed Conference Proceedings Extended Abstracts
  1. M. Madou, T. Otagawa, J. Joseph, P. Hesketh, and A. Saaman, "Catheter-Based Micromachined Electrochemical Sensors," SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering, Los Angeles, CA, pp. January, 1989.
  2. P. Hesketh, M. Madou, T. Otagawa, J. Joseph, and A. Saaman, "A Microelectrochemical Blood Gas Sensing Probe," Electrochemical Society 175th Meeting, Los Angeles, CA, pp. May, 1989.
  3. Chishein Ju, Peter J. Hesketh, Elmer Zanoria, Steven Danyluk, "Three Dimensional Anisotropic Etching of Silicon," Proceedings of the Electrochemical Society, Phoenix, AZ, pp. 791-780, October, 1991.
  4. P. J. Hesketh, "Determination of the Key directions in Silicon Anisotropic Etching in KOH and CsOH," Invited Paper, Proceedings of the Electrochemical Society Meeting, St. Louis, MO, pp. 791, May, 1992.
  5. H. Kasapbasioglu, P. J. Hesketh, and A. Macrander, "Design and Fabrication of a Silicon X-Ray Analyzer," 181st Meeting of the Electrochemical Society, St. Louis, MO, pp. May, 1992.
  6. B. Kasapbasioglu, P. J. Hesketh, W. C. Hanly, and G. J. Maclay, "A Thin Platinum Film Glucose Sensor," 181st Meeting of the Electrochemical Society, St. Louis, MO, pp. May, 1992.
  7. Zikang Pan, P. J. Hesketh, and G. J. Maclay, "Novel Embedded Capacitive Sensors for Monitoring the Cure of Polyimide in Multi-Chip Modules," 182nd Meeting of the Electrochemical Society, Toronto, Canada, pp. 989-990, October, 1992.
  8. T. Nelson and P. J. Hesketh, "Microfabrication of Highly Porous Polymer Membranes," 183rd Meeting of the Electrochemical Society, Hawaii, pp. 2719-2720, May, 1993.
  9. Pu Yangqing and P. J. Hesketh, "Anodic Passivation of Silicon in KOH in the Dark," Proceedings of the 185th Meeting of the ECS, San Francisco, May, pp. .1994.
  10. Tang Wong, Swatee Surve, and P. J. Hesketh, "Anisotropic Etching of Silicon in Rubidium Hydroxide," Proceedings of the 185th Meeting of the ECS, San Francisco, May, pp. 1994.
  11. Shiming Yao, P. J. Hesketh and A. T. Macrander, "Low Temperature (200°C) Silicon-Silicon Direct Wafer Bonding of an X-ray Analyzer Crystal," Proceedings of the 185th Meeting of the ECS, San Francisco, May, pp. 1994.
  12. D. Beirne, T. Nelson, and P. J. Hesketh, "Three-Dimensional Microfabricated Polyimide Membranes," Proceedings of the 186th Meeting of the Electrochemical Society, Miami, Florida, October, pp. 1994.
  13. Ji Jiahui and P. J. Hesketh, "Anisotropic etching of silicon spheres," Proceedings of the 186th Meeting of the Electrochemical Society, Miami, Florida, October, pp. 1994.
  14. Jaihui Ji, Yangqing Pu, and P. J. Hesketh, "Anisotropic etching of single crystal silicon in KOH and KOH/alcohol solutions," Proceedings of the 188th Meeting of the Electrochemical Society, Chicago, IL, pp. 1532-1533, October 1995.
  15. Yu-Cheng Lin, P. J. Hesketh, S. M. Lunte and G. S. Wilson, "A micromachined micropump," Proceedings of the 188th Meeting of the Electrochemical Society, Chicago, IL, pp. 1487-8, October 1995.
  16. P. J. Hesketh, S. Zivanovic, Y. D. Ming, J. R. Stetter, and G. S. Wilson, "Characteristics of impedance based immunobiosensor for the detection of microbial toxins," Proceedings of the 191st Meeting of the Electrochemical Society, Montreal, Canada, pp. 1472-3, May, 1997.
  17. B. Shih, L. St.Clair, P. J. Hesketh, D. L. Naylor and G. M. Yershov, "A Micromachined Chamber to Enclose Acrylamide Gel Array Coated Substrates and to Control and Distribute Small Liquid Samples Over the Array," Proceedings of the 191st Meeting of the Electrochemical Society, Montreal, Canada, pp. 1446-7, May, 1997.
Refereed Conference Proceedings Abstracts
  1. P. J. Hesketh, B. Gebhart, and J. N. Zemel, "A mathematical model for the pyroelectric anemometer," Abstract of the American Physical Society, March Meeting, Detroit, Michigan, p. 1984.
  2. ChunShien Li, P. J. Hesketh, G. J. Maclay, "Embedded Ultra-Thin Film Strain Gauges for Multichip Module Process Monitoring," 39th National Symposium of the American Vacuum Society, Chicago, p. 251, November, 1992.
  3. Zikang Pan, P. J. Hesketh, and G. J. Maclay, "Embedded Capacitive Sensors for Multi-Chip Module Manufacturing Process Monitoring," 39th National Symposium of the American Vacuum Society, Chicago, p. 251, November, 1992.
  4. B. Kasapbasioglu, P. J. Hesketh, G. J. Maclay, and W. C. Hanly, "A Novel Ultra-Thin Platinum Film Biosensor," 39th National Symposium of the American Vacuum Society, Chicago, p. 250, November, 1992.
  5. ChunShien Li, P. J. Hesketh, G. J. Maclay, "Embedded Ultra-Thin Film Strain Gauges for Multichip Module Process Monitoring," 41st National Symposium of the American Vacuum Society Meeting, Florida, p. 290, October, 1993.
  6. B. Shih, L. St.Clair, P. J. Hesketh, D. L. Naylor and G. M. Yershov, "A Micromachined Chamber to Enclose Acrylamide Gel Array Coated Substrates and to Control and Distribute Small Liquid Samples Over the Array," in 197th Meeting of The Electrochemical Society, New Jersey, pg. 94 (1997).
  7. YuDong Ming, C.-D. Feng, P. J. Hesketh, G. J. Maclay, and J. R. Stetter, "Study of ultrathin Pt film immunosensors with different thickness and macrogeometry," 45th National Symposium of the American Vacuum Society Meeting, Minneapolis, pg. October, 1995.
  8. P. J. Hesketh, S. C. Pak, S. Zivanovic, W. R. Penrose, S. Svojanovsky, J. R. Stetter, and G. S. Wilson, "Impedance based biosensors for the detection of bacterial toxins," AOAC Meeting, San Diego, pg. (August, 1997).
  9. J. R. Stetter, P. J. Hesketh and G. J. Maclay, "Use of micromechanical methods in chemical microsensors," 192nd Meeting of the Electrochemical Society, Paris, France, pg. 797. (September, 1997).
  10. U. Elp, V. Metlushko, G. Crabtree, Z. Zhang, S.R.J. Brueck, B. Watkins, L.E. Delong, K. Chung, B. Ilic, and P. J. Hesketh, "Vortex dynamics in thin vanadium films with periodic arrays of pinning centers," MAR98 Meeting of the American Physical Society, (1998).
  11. T. Stanczyk, and P. J. Hesketh, "Three Electrode Pressure Generation,” 2nd International Symposium on Electrochemical Microsystem Technologies, Wasada University, Tokyo, Japan, pg 104, September, 1998.
  12. S. Pak, B. Ilic, P. J. Hesketh, and W. Penrose, "Conductimetric immunobiosensor for the detection of bacterial toxins," ibid, pg 140 (1998).
  13. K. Y. Chung, P. J. Hesketh and G. M. Yershov, “Fabrication of a micromachined chamber for sequencing by hydridization," ibid, pg 162 (1998).
  14. T. Stanczyk, B. Ilic, P. J. Hesketh, and J. G. Boyd "Electrochemical Pressure Generation 194th Meeting of The Electrochemical Society, Boston, pg. 276, October, 1998.
  15. S. C. Pak, P. J. Hesketh, B. Ilic, and W. Penrose, "Ultrathin film impedance based immunobiosensor," 194th Meeting of The Electrochemical Society, Boston, pg 123. Nov, 1998.
  16. K. Y. Chung, P. J. Hesketh and G. M. Yershov, “Microfabrication of microchamber for sequencing by hybridization with oligonucleotides matrix," 194th Meeting of The Electrochemical Society, Boston, pg 123, Nov, 1998.
  17. V. Metluchko, U. Welp, G. Crabtree, R. Osgood, S. D. Bader, D. J. Hinks, Z. Zhang, S. R. J. Brueck, B. Watlins, L. E. DeLong, B. Ilic, K. Chung, and P. J. Hesketh, Superconducting nanostructures materials," 194th Meeting of The Electrochemical Society, Boston, pg 257, Nov, 1998.
  18. T. Stanczyk, P. J. Hesketh, and J. G. Boyd "Electrochemical Pressure Generation,” 196th Meeting of The Electrochemical Society, Hawaii, pg 276, Oct. 1999.
  19. S. C. Pak, P. J. Hesketh, and W. R. Penrose, "An impedance based immunobiosensor," in Proceedings of the 196th Meeting of The Electrochemical Society, Hawaii, pg 276, Oct. 1999.
  20. D. S. Creyts IV, P. J. Hesketh and G. C. Frye-Mason “Design of a MEMS Magnetic Bi-Stable Valve,” in Proceedings of the 200th Meeting of the Electrochemical Society, Phoenix, pg. 305, October, 2000.
  21. R. S. Evans and P. J. Hesketh, “Developing a µ-Fabrication Course: A Study in Multidisciplinary MEMS Curriculum Development,” in Proceedings of the 198th Meeting of the Electrochemical Society, Phoenix, pg. 340, October, 2000.
  22. P. J. Hesketh, “Microfabriation of chemical and biosensor packaging,” ASME IMAPS Workshop, Orlando, FL, pg. 14, November, 2000.
  23. L. A. Tse, P. J. Hesketh, J. Gole and D. W. Rosen, “Rapid prototyping of chemical sensor packages with sterreolithography,” Spring ECS Meeting, Washington DC, March 2001.
  24. L. A. Tse, P. J. Hesketh and D. W. Rosen, “Rapid prototyping of high aspect ratio structures with sterreolithography,” HARMS, Munich, Germany, June 2001.
  25. L. A. Tse, L. Seals, P. J. Hesketh, J. Gole and D. W. Rosen, “Rapid prototyping of gas chromatograph with stereolithography,” Fall ECS Meeting, San Francisco CA, Sept. 2001.
  26. M. Moorman, P, J. Hesketh, Jiantao Zheng, and S. Danyluk, “A Novel, Micro- Contact Potential Difference Probe,” Proceedings of the Spring MRS Meeting, San Francisco, April, 2002.
  27. J. L. Gole, L. Seals, L. A. Tse, and P. J. Hesketh, “Rapid, reversible, sensitive porous silicon gas sensor,” Proceedings of the 201st Meeting of the Electrochemical Society, Philadelphia, May, 2002, pg. 1539.
  28. L. A. Tse, P. J. Hesketh J. L. Gole, and D. W. Rosen, “Stereolithography on Silicon for Microfluidics and Microsensor Packaging,” Proceedings of the 201st Meeting of the Electrochemical Society, Philadelphia, May, 2002, pg. 1552.
  29. Heongjoo Shin and P. J. Hesketh “Fabrication of micro-four point probe cantilevers and tips,” Proceedings of the 201st Meeting of the Electrochemical Society, Philadelphia, May, 2002, pg. 1550.
  30. J. Sutanto and P. J. Hesketh “Design and modeling of an latching microvalve,” Proceedings of the 201st Meeting of the Electrochemical Society, Philadelphia, May, 2002, pg. 1547
  31. P. J. Hesketh, “Stereolithography Packaging of Microfluidic Components and Sensors for Microsystems,” Society for Industrial Microbiology Annual Meeting, Philadelphia, PA (11-15th August 2002), pg.
  32. J. Sutanto and P. J. Hesketh “Fabrication of a Bistable Electromagnetic Actuator for Microvalve ,” Proceedings of the 201st Meeting of the Electrochemical Society, Paris, May, 2003, pg.
  33. P. R. Luharuka, W. Morlock, C. Wu, A. Choudhury and P. J. Hesketh, “Constant Pressure Dispensing Unit For Microfluidic Applications,” Proceedings of the 203rd Meeting of the Electrochemical Society, Paris, May, 2003, pg.
Refereed Conference Poster Presentations
  1. P. J. Hesketh, Chishein Ju, E. Zanoria, and S. Danyluk, "A Surface Free Energy Model of Silicon Anisotropic Etching," late news poster at the Sensors and Actuator Workshop, Hilton Head, South Carolina, June, 1992.
  2. H. Kasapbasioglu, P. J. Hesketh, and A. T. Macrander, "Microfabrication Techniques for Single Crystal Silicon X-Ray Analyzer," late news poster at the Sensors and Actuator Workshop, Hilton Head, South Carolina, June, 1992.
  3. H. Kasapbasioglu, P. J. Hesketh, W. C. Hanly, and G. J. Maclay, "A Platinum Island Film Glucose Sensor," 4th International Meeting on Chemical Sensors, Tokyo, Japan, September, 1992.
  4. H. Kasapbasioglu, R. N. Esfahani, P. J. Hesketh, W. C. Hanly, and G. J. Maclay, "A Novel Ultra-Thin Platinum Film Biosensor," Gordon Conference on Bioanalytical Sensors, Ventura, CA, March, 1993.
  5. Chang-Dong Feng, T. E. Nelson, S. Hardman, P. J. Hesketh, G. J. Maclay, S. M. Gendel, and J. R. Stetter, "Impedance analysis of ultrathin platinum film immunosensors with different thickness and macrogeometry," Proceedings of Transducers '95, Stockholm, Sweden, June, 1995.
  6. Yu-Cheng Lin, P. J. Hesketh, J. Boyd, S. M. Lunte and G. S. Wilson, "Characteristics of a polyimide microvalve," Sensors and Actuator Workshop, Hilton Head, South Carolina, June, 1996.
  7. T. Stanczyk, and P. J. Hesketh, "Electrochemical Pressure Generation" Solid-State Sensor and Actuator Workshop, Hilton Head, June, 1998.
  8. S. C. Pak, P. J. Hesketh, and W. R. Penrose, "Optimization of immobilization layer on for an immunobiosensor," µTAS'98 Workshop, Bamff, Canada, Oct 1998.
  9. L. Seals, J. L. Gole, P. J. Hesketh, “Low resistance contact to porous silicon sensor,” Gordon Conference on High Temperature Materials, Processes, and Diagnostics, August 2000.
  10. D. S. Crytes and P. J. Hesketh, “Modeling of a latching electromagnetic microvalve,” MEMS-CAD, Hilton Head, March 2001.
  11. Hong-Seok Noh, P. J. Hesketh, and G. C. Frye-Mason, “Heating Element Embedded Parylene Microcolumn For Miniature Gas Chromatograph,” MEMS’02, Las Vegas, February, 2002.
  12. S.-K. Kim, P. J. Hesketh, and C. Li, “Current enhancement by redox cycling at coplanar and comb interdigitated electrodes,” Gordon Research Conference on Bioanalaytical Sensors, Ventura, CA, March 2002.
  13. S.-K. Kim and P. J. Hesketh, “Microbead-based Electrochemical Immunoassay System with Comb Interdigitated Arrays (IDA)” MEMS’03, Kyoto, January, 2003.
  14. A. Choudhury and P. J. Hesketh, “A Novel Method of Stereolithographic Alignment For MEMS Structures,” Abstract Number: 626, NanoTech 2003, San Francisco, Feb 23-27th (2003).
Published Conference Papers (non-refereed)
  1. Yu-Cheng Lin, J. P. Schuster and P. J. Hesketh, "Silicon Pressure Sensor Die Mounting Stress Analysis," Motorola Advanced Technology Symposium, pp. February, 1992.
  2. T. Nelson and P. J. Hesketh, "Microfabrication of Highly Porous Polymer Membranes," in Chemical Sensors '93, Softbound Proceedings of the ECS, Vol. 93-7, (The Electrochemical Society, Pennington, New Jersey) pp. 2719-2720 (1993).
  3. Pu Yangqing and P. J. Hesketh, "Anodic Passivation of Silicon in KOH in the Dark," in Microstructures and Microfabricated Systems, Softbound Proceedings of the ECS, Vol. 94-14 (The Electrochemical Society, Pennington, New Jersey) pp. 164-175, (1994).
  4. Tong Wang, Swatee Surve, and P. J. Hesketh, "Anisotropic Etching of Silicon in Rubidium Hydroxide," ibid, pp. 202-209 (1994).
  5. Shiming Yao, P. J. Hesketh and A. T. Macrander, "Low Temperature (200°C) Silicon-Silicon Direct Wafer Bonding of an X-ray Analyzer Crystal," ibid, pp. 196-201 (1994).
  6. Jaihui Ji, Yangqing Pu, and P. J. Hesketh, "Anisotropic etching of single crystal silicon in KOH and KOH/alcohol solutions," in Microstructures and Microfabricated Systems - II, Hardbound Proceedings of the ECS, Vol. 95-27 (The Electrochemical Society, Pennington, New Jersey) pp. 280-289 (1995).
  7. Yu-Cheng Lin, P. J. Hesketh, S. M. Lunte and G. S. Wilson, "A micromachined micropump," ibid. pp. 67-72 (1995).
  8. J. R. Stetter, P. J. Hesketh and G. J. Maclay, "Use of micromechanical methods in chemical microsensors," in Chemical Sensors-IV, Proceedings Volume of the Electrochemical Society, pg. (1997).
  9. B. Shih, L. St.Clair, P. J. Hesketh, D. L. Naylor and G. M. Yershov, "A Micromachined Chamber to Enclose Acrylamide Gel Array Coated Substrates and to Control and Distribute Small Liquid Samples Over the Array," in Microstructures and Microfabricated Systems - III, Hardbound Proceedings of the ECS, PV. 97-5, pp. 188-194 (The Electrochemical Society, New Jersey, 1997).
  10. T. Stanczyk, R. Illic, and P. J. Hesketh, "Electrochemical Pressure Generation," in Microstructures and Microfabricated Systems – IV, Proceedings Volume of The Electrochemical Society, pg 94-101, 1998.
  11. S. Pak, P. J. Hesketh, B. Ilic, and W. Penrose, Optimization of layer on impedance based immunobiosensor," in ibid, pg 176-184.
  12. K. Y. Chung, P. J. Hesketh and G. M. Yershov, “Microfabrication of microchamber for sequencing by hybridization with oligonucleotides matrix,” ibid, pg 245-256.
  13. V. Metluchko, U. Welp, G. Crabtree, R. Osgood, S. D. Bader, D. J. Hinks, Z. Zhang, S. R. J. Brueck, B. Watlins, L. E. DeLong, B. Ilic, K. Chung, and P. J. Hesketh, Superconducting nanostructures materials," ibid, pg 257-265.
  14. H. S. Noh, C. Bonner, and P. J. Hesketh, “Fabrication of parylene columns for microfluidics,” Proceedings of the 7th Mechatronics Forum International Conference, 6-8th September 2000, Georgia Institute of Technology, Atlanta, GA.
  15. J. Pikarsky, and P. J. Hesketh, “Fabrication of silicon pin array microfluidics,” Proceedings of the 7th Mechatronics Forum International Conference, 6-8th September, Georgia Institute of Technology, Atlanta, GA, pg. (2000)
  16. D. Creyts IV, P. J. Hesketh and G. C. Frye-Mason “Design of a MEMS Magnetic Bi-Stable Valve,” in Microfabricated Systems and MEMS-V, Proceedings of the Electrochemical Society, Vol. 00-19, pp. 95-100, 2000.
  17. R. S. Evans and P. J. Hesketh, “Developing a µ-Fabrication Course: A Study in Multidisciplinary MEMS Curriculum Development,” ibid, pg. 220-228.
  18. L. A. Tse, P. J. Hesketh, J. Gole and D. W. Rosen, “Fabrication of chemical sensor packaging with stereolithography,” in Artificial Chemical Sensing 8/Olfaction and the Electronic Nose-ISOEN 2001, Proceedings of the ECS, Vol. 2001- 15, pg. 98-104.
  19. L. A. Tse, L. Seals, J. Gole, D. W. Rosen and P. J. Hesketh, “Characterization of stereolithography fabricated gas chromatographic column,” in Chemical and Biological Sensors and Analytical Methods - II, Proceedings Volume 2001-18, (The Electrochemical Society, New Jersey, 2001) pg. 664-668.
  20. J. L. Gole, L. Seals, L. A. Tse, and P. J. Hesketh, “Rapid, reversible, sensitive porous silicon gas sensor,” in Microfabricated Systems and MEMS- VI, Proceedings Volume 2002-6 , (The Electrochemical Society, New Jersey, 2002) pg. 13-23.
  21. L. A. Tse, D. W. Rosen, J. L. Gole and P. J. Hesketh “Stereolithography on Silicon for Microfluidics and Microsensor Packaging,” ibid pg. 136-143.
  22. Heongjoo Shin and P. J. Hesketh “Microfabrication of Nickel Cantilever Arrays and Probe Tips,” ibid. pg. 104-113.
  23. J. Sutanto-Bintro and P. J. Hesketh “Mechanical and Magnetic Analysis of a Latching Electromagnetic Microvalve,” ibid., pg. 93-102.
Conference Proceedings Abstracts (nonrefereed)
  1. Sanjay Gowda and P. J. Hesketh, "Computer modeling of silicon anisotropic etching" ECS Student Symposium, Milwaukee, WI, April, 1993.
  2. Tong Wang and P. J. Hesketh, "Measurements of the etch rate and activation energy of silicon in KOH, RbOH and CsOH," Electrochemical Society Student Symposium, Milwaukee, WI, April, 1993.
  3. ChunShien Li, P. J. Hesketh, G. J. Maclay, "Ultrathin Film Strain Gauges," Illinois Chapter of the AVS Annual Fall Meeting, Chicago, IL, September, 1993.
  4. Y. Pu and P. J. Hesketh, "Passivation of silicon in KOH and CsOH," Illinois Chapter of the AVS Annual Fall Meeting, Chicago, IL, September, 1993.
  5. T. Nelson, P. J.. Hesketh, and G. J. Maclay, "Characterization of an Ultrathin Pt-film Biosensor" 3rd Annual Midwest STM/AFM Workshop, Purdue University, December, 1993.
  6. Jaihui Ji, Yangqing Pu and P. J. Hesketh, "Anisotropic etching of single crystal silicon spheres," Electrochemical Society Student Symposium, Madison, WI, April, 1995.
  7. Yudong Ming, C.-D. Feng, P. J. Hesketh, G. J. Maclay, and J. R. Stetter, "Preparation and characterization of ultra-thin Pt and Au films," Annual Fall Meeting of the Illinois Chapter of the AVS, September 14th, 1995.
  8. P. J. Hesketh, "Applications of Biosensors Technology to Biomechanics Research," Biomechanics Symposium, Department of Mechanical Engineering, UIC, IL, September 14th 1995.
  9. A. T. Macrander, M. Saginuri, S. Yao, P. J. Hesketh, and C. Bresloff, "Possible use of direct silicon-on-silicon bonding for construction of analyzers for inelastic scattering," APS x-ray Centennial Symposium Seventh Users Meeting for the APS, Argonne, IL, p. October, 1995.
  10. B. Shih, L. St.Clair, P. J. Hesketh, D. L. Naylor and G. M. Yershov, "A Micromachined Chamber to Enclose Acrylamide Gel Array Coated Substrates and to Control and Distribute Small Liquid Samples Over the Array," Graduate Student Symposium of the Electrochemical Society, Chicago, (May, 1997).
  11. J. Cunneen, P. J. Hesketh, S. M. Lunte and G. S. Wilson, "A micromachined micropump," Graduate Student Symposium of the Electrochemical Society, Chicago, (May, 1997).
  12. S. C. Pak, Y.-D. Ming, S. Zivanovic, B. Ilic, P. J. Hesketh, W. R. Penrose, and J. R. Stetter, "Immunobiosensor for the detection of SEB in milk," Proceedings of Transducers '95, National Center for Food Safety, Biotechnology Working Group Meeting, Oct., (1997).
  13. P. J. Hesketh, S. Zivanovic, J. R. Stetter, and G. S. Wilson, "Impedance based biosensors for the detection of bacterial toxins," Whitaker Foundation, Annual Meeting, Snow Bird, Utah, (July, 1997).
  14. T. Stanczyk, and P. J. Hesketh, "Electrochemical Pressure Generation", poster presented at the Beckman Institute Symposium on the Frontiers of Mesoscale Systems and Microfabrication. Urbana, Illinois, May, 1998.
  15. S. Pak, S. Zivanovic, B. Ilic, P. J. Hesketh, W. Penrose, and J. R. Stetter, "An impedance based immunobiosensor," ibid, 1998.
  16. K. Y. Chung, P. J. Hesketh and G. M. Yershov, “Microfabrication of microchamber for sequencing by hydridization with oligonucleotides matrix,", ibid, 1998.
  17. J. Cunneen, S. Caraffini, J. G. Boyd, and P.J. Hesketh, "A Positive Displacement Micropump," ibid, 1998.
  18. S. C. Pak, B. Ilic, P. J. Hesketh, and W. R. Penrose, "An immunobiosensor for the detection of bacterial toxins," Student Symposium of the Electrochemical Society, Marquette University, April, 1999.
  19. H. S. Noh, and P. J. Hesketh, “Fabrication of parylene columns for microfluidics,” Spring Local Section Meeting of the Electrochemical Society, Georgia Institute of Technology, Atlanta, GA, May, 2000.
  20. L. Seals, L. A. Tse, S.K. Kim, P. J. Hesketh and J. L. Gole, “Gas sensing with porous silicon sensor,” Poster presentation at the Molecular Design Institute, Georgia Tech, May 2001.
  21. Heongjoo Shin, P. J. Hesketh “Micro-four point probe for conductivity mapping,” 3rd Nanotechnology Conference, Atlanta, GA, September 2001.
  22. P. J. Hesketh and J. L. Gole, “Porous silicon gas sensor and stereolithography for sensor packaging,” Poster presentation at the Navy Industry R&D Partnership Conference, Washington, DC, 13-14th August, 2002.
  23. A. Choudhury and P. J. Hesketh, “Stereolithographic Alignment Methods for MEMS,” Center for Rapid Prototyping Workshop, Atlanta, GA, Feb 7th (2003).
  24. P. J. Hesketh, “Humor for Motivating Students Learning in the Classroom,” 10th Georgia Conference on College and University Teaching, February 7-8th, 2003.
Invited Talks, at Conferences
  1. Invited talk: "Determination of the Key Directions in Silicon Anisotropic Etching in KOH and CsOH," 181st Electrochemical Society Meeting, St. Louis, MO, May, 1992.
  2. Invited talk: "MEMS: Silicon Technology for Sensors and Actuators," Sensors Expo '95, Chicago, IL, September 1995.
  3. Invited talk: "MEMS and Biosensors," International Center for Actuators and Transducers Symposium, Penn State, April 22nd, 1996.
  4. Invited talk: "Microsensors and Microfabricated Systems", Résumés/Abstracts, Union Radio-Scientifique Internationale, Lille, France, August-September 1996.
  5. Invited talk: "Biosensors and microfluidic systems," International Aerospace Symposium '96 Nagoya, Japan, December 1996.
  6. Invited talk: "A Positive Displacement Micropump for Microfluidic Systems," ASME Symposium on Microelectromechanical Systems, Chicago, August, 1997.
  7. Invited talk: "Impedance Based Biosensors for the Detection of Bacterial Toxins," AOAC Meeting, San Diego, August, 1997.
  8. Keynote talk: “Microfabricated Biosensors and Microsystems,” Proceedings of the 21st International Conference on Microelectronics, (MIEL'97) Nis˜ , Yugoslavia, September 1997.
  9. Invited talk: "Silicon Anisotropic Etching in KOH, KOH/alcohol and CsOH Solutions," Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, Holten, The Netherlands, May, 1998.
  10. Keynote talk: "Micromachining of Sensors and Fluidic Devices," 2nd International Symposium on Electrochemical Microsystems Technologies, Wasada University, Tokyo, Japan, September, 1998.
  11. Invited talk: P. J. Hesketh, “Microfabriation of Chemical and Biosensor Packaging,” ASME IMAPS Workshop, Orlando, FL, Nov. 11-13th, 2000.
  12. Keynote talk: “Microfluidic Systems,” First Cross-Strait Symposium on Microsystem Technology, May 17-20th, 2000, Tainan, Taiwan, R.O.C.
  13. Invited talk: L. A. Tse, P. J. Hesketh J. L. Gole, and D. W. Rosen, “Stereolithography on Silicon for Microfluidics and Microsensor Packaging,” Proceedings of the 201st Meeting of the Electrochemical Society, Philadelphia, May, 2002.
  14. Invited talk: P. J. Hesketh, “Stereolithography Packaging of Microfluidic Components and Sensors for Microsystems,” Society for Industrial Microbiology Annual Meeting, Philadelphia, PA (11-15th August 2002)
Invited Seminars, Talks, and Presentations
  1. “Anomalous Radiation Emission from Microconfigured Silicon Surfaces,” University of Hawaii, May 1987.
  2. "Micromachining of High Heat Transfer Surfaces," Argonne National Laboratories, May, 1991.
  3. "Embedded Sensors for Multi-Chip Module Manufacturing Process Monitoring," the MRC Multi-Chip Module Workshop, University of Illinois at Urbana-Champagne, June 1991.
  4. "Three Dimensional Anisotropic Etching of Silicon - Identification of Key Etching Directions," Local Meeting of the Chicago Chapter of the Electrochemical Society, January, 1992.
  5. "3-D Microfabrication Utilizing Silicon Anisotropic Etching - Identification of Key Etching Directions," Joint Engineering and Chemistry Department Seminar, Illinois Institute of Technology, March, 1992.
  6. "Thin Film Thermopile Sensors and Anisotropic Etching of Silicon, " NIST, Gaithersburg, Maryland, April, 1992.
  7. “Research activities at the Microfabrication Applications Laboratory at the University of Illinois at Chicago,” Workshop on High Aspect Ratio Microfabrication (HARM) at Ford Motor Company, Dearborn, MI. - May 1992
  8. "Thin Discontinuous Conductive Film Biosensor," Research Corporation Technologies, Tucson, AZ, August, 1992.
  9. "Micromachining, Microsensors and Microdevices," Eta Kappa Nu Seminar at EECS Department, UIC, October, 1993.
  10. "Application of Micromachining to Microsensors and Microdevices," Department of Electrical Engineering and Computer Engineering, Marquette University, February, 22nd, 1994.
  11. "Micromachining-Microsensors and Microdevices", Department of Electrical Engineering, University of Pennsylvania, September 22, 1994.
  12. "Micromachining, Microsensors and Microdevices:, Department of Chemistry, University of Kansas, October 31, 1994.
  13. "Application of Biosensors Technology to Biomechanics Research" Biomechanics Symposium, College of Engineering, UIC, September 14th, 1995.
  14. "Micromachines: Microfabrication of Silicon for Fluid System Miniaturization," IEEE Local Section Meeting, March 27th, 1996.
  15. "Microfabrication of Miniature Chemical Sensor Systems," Chemical Technology Division, Argonne National Laboratory, April 4th, 1996.
  16. "Biosensors and Microfluidic Systems," Dept. of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Oct. 16, 1997.
  17. “Web based course in micromachining and microdevices,” University of Illinois at Urbana-Champaign, June, 1998.
  18. “Micromachining,” one day short course presented at the Fall Meeting of the Electrochemical Society, October, 1998.
  19. “Research activities in MEMS at the George Woodruff School of Mechanical Engineering,” Workshop on SIMBOS at DARPA, Alexandria, DC. - April 1999.
  20. “Microfabricated Chemical and Biosensors,” Bioengineering Seminar at Georgia Institute of Technology, May, 2000.
  21. “Micromachining Processes,” presented at the MEMS Boot Camp, Georgia Institute of Technology, May 2000.
  22. “Micromachining,” one day short course presented at the Fall Meeting of the Electrochemical Society, October, 2000.
  23. “Microfabrication and Packaging of Chemical and Biosensors,” Sandia National Laboratory Seminar, October, 2000.
  24. “Microfabricated Chemical and Biosensors in Microfluidic Systems,” Motorola, Mesa, AZ, October, 2000.
  25. “Microfabrication and Packaging of Chemical and Biosensors,” Oak Ridge National Laboratory Seminar, November, 2000.
  26. “Micromachining Processes,” presented at the MEMS Boot Camp, Georgia Institute of Technology, May 2001.
  27. “Microfluidic Components and Sensors for Microsystems,” Biological and Agricultural Engineering, University of Georgia, Athens, GA, March 2002.
  28. “Micromachining Processes,” presented at the MEMS Boot Camp, Georgia Institute of Technology, May 2002.
  29. “Micro Chem Lab on a chip,” Department of Physiology, Emory University, Oct. 24th, 2002.
  30. “Microfabricated components for miniature chemical analysis systems on a chip,” NIST, Gaithersburg, Maryland, Feb. 12th, 2003.


Other Scholarly Accomplishments

Patents and Provisional Patents
  1. Holland, and P. J. Hesketh, "Miniature pressure sensor and pressure sensor arrays," Oliff & Berridge, Alexandria, VA, US patent #5,163,328, 1992, and #5,277,067, 1994.
  2. M. Gerber, P. J. Hesketh, "Thermopile having reduced thermal noise," Filfe & Lynch, New York, NY, US patent #551545, 1990.
  3. Holland and P. J. Hesketh "Miniature Pressure Sensor and Pressure Sensor Arrays," Patent # 5,277,067, September, 1992.
  4. J. R. Stetter, S. M. Gendel, G. J. Maclay, and P. J. Hesketh, "Antibody covalently bound immunobiosensor," NCFST/IIT, US patent #5,567,301, 1996.
  5. R. Adkins, C. C. Wong, G. Frye-Mason, B. L. Spletzer, G. J. Fischer, P. J. Hesketh, “Miniature Electrically Operated Diaphragm Valve,” Sandia National Laboratory, US patent #6,328,279, Dec. 2001.
  6. L. T. Seals, J. L. Gole and P. J. Hesketh, “Microfabricated porous silicon chemical sensor,” Georgia Tech provisional patent applied, May 2000.
  7. A. Fedorov, P. J. Hesketh, J. L. Gole, and M. White, “Photocatalytic microfabricated porous silicon sensors,” Georgia Tech provisional patent applied, December, 2000.
  8. L. A. Tse, P. J. Hesketh and D. L. Rosen, “Sterolithography and MEMS Integrated Processing,” Georgia Tech., provisional patent applied, October 2001.
  9. J. Pikarsky and P. J. Hesketh, "Pin Array Assembly and Method of Manufacture," US Patent #6,455,352, September, 2002.
  10. Lid Wong, Sangkyung Kim, Peter J. Hesketh, “A Miniature Optically Coupled Electrically Isolated ultrasensitive Dynamic Pressure Detector,” provisional patent (2003).
Invention Disclosures and Pending Applications
  1. J. N. Zemel and P. J. Hesketh, "Microarchitectuaral Deep Well Surfaces," Woodcock Washburn Kurtz Mackiewicz & Norris, Philadelphia, PA, patent pending, 1987.
  2. P. J. Hesketh and A. Rossengreen, "Integrated Optical Hydrogen Sensor," SRI-International invention disclosure 1988.
  3. G. B. Andeen, P. J. Hesketh, and R. Kornbluh, "Artificial Muscle," S. W. Chailin & Associates, Cupertino, CA, patent pending, 1989.
  4. G. J. Maclay, P. J. Hesketh, and W. C. Hanly, "A thin conductive film biosensor," Research Corporation Technologies, Tucson, AZ, invention disclosure, 1991. Selected for further review and received $1,000. Patent not applied for.
  5. P. J. Hesketh, Yu-Cheng Lin, "Micromachined Polymer Valve and Micropump," UIC invention disclosure, August, 1992.
  6. P. J. Hesketh and K. Pasch, "Microactuator," UIC invention disclosure, August, 1993.
  7. P. J. Hesketh, Yu-Cheng Lin, "A Micromachined Micropump," UIC invention disclosure, Feb, 95.
  8. P. J. Hesketh, "An Electrochemical Drive for a Micropump," UIC invention disclosure, April, 95.
  9. P. J. Hesketh and J. G. Boyd, "Microhydraulic seals," UIC invention disclosure, August, 95.
  10. J. R. Woodruff and P.J. Hesketh, "Electronic Drive for Accelerometer," invention disclosure, May 1996.
  11. B. Ilic and P. J. Hesketh, “Four point nanoprobe” UIC invention disclosure, May 1998.
  12. J. Pikarsky and P. J. Hesketh, "Fabrication of high aspect ratio single crystal silicon pins," UIC ” invention disclosure, Dec. 1999.
  13. Federov, L. Degerteken, P. J. Hesketh, “Micro-manufacture of microfoams,” Georgia Tech invention disclosure, February, 2000.
  14. P. J. Hesketh, J. L. Gole, A. Fedorov, and M. White, “A porous silicon biosensor,” Georgia Tech invention disclosure, August 2000.
  15. P. J. Hesketh, H.-S. Noh, and G. Frye-Mason, “Fabrication of parylene microcolumn for a miniature gas chromatograph,” Georgia Tech invention disclosure, September 2000.
  16. P. J. Hesketh and M. Moorman, “Parylene Flex Circuit for MEMS,” Georgia Tech invention disclosure, October 2001.
  17. P. J. Hesketh and Sang Kyung Kim, “Comb Interdigitated Electrodes for Sensors,” Georgia Tech invention disclosure, October 2001.
  18. L. A. Tse, P. J. Hesketh, D. W. Rosen “Sterolithography for Microfuel Cells,” Georgia Tech., invention disclosure, April 2002.
  19. P. J. Hesketh, “Sterolithography connections for fuel reservoir to microfuel cells,” Georgia Tech., invention disclosure, May 2002.
  20. R. Luharuka and P. J. Hesketh, “Quick connector built by sterolithography for fuel cell applications,” Georgia Tech., invention disclosure, Oct. 2002.
  21. J. Sutanto-Bintro and P. J. Hesketh, “Electromechanical valve fabrication methods,” Georgia Tech., invention disclosure, Oct. 2002.
  22. C.-F. Wu, D. W. Rosen, and P. J. Hesketh, “Stereolithographically defined pressure generators pumps and bellows for miniature fuel cells,” Georgia Tech., invention disclosure, Oct. 2002.
  23. R. Luharuka, Chi Fu Wu and P. J. Hesketh, “Constant-pressure Disc-type Dispensing Unit,” Georgia Tech., invention disclosure, Jan. 2003.
  24. H.-S. Noh, Chi Fu Wu and P. J. Hesketh,, “Microfabrication methods for miniature fluid channels and columns,” Georgia Tech invention disclosure, January 2003.
  25. C.-F. Wu and P. J. Hesketh, “Novel electrode design for pressure generator,” Georgia Tech., invention disclosure, March. 2003.
  26. C.-F. Wu and P. J. Hesketh, “Control of two phase flow with membranes and swirling flow for fuel cells,” Georgia Tech., invention disclosure, March. 2003.
  27. J. Sutanto Bintoro and P. J. Hesketh, “Electromechanical latching microvalve with multiple stable states,” Georgia Tech., invention disclosure, June. 2003.

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© Jonathan Coe, 6/5/2003
Last Updated: 8/1/2003