| Credit Hours | 2-3-3 |
| Prerequisite: | Graduate standing in engineering or related discipline |
| Catalog Description: | Principles of microfabrication for sensors and actuators. Lumped parameter analysis and computer-aided design; materials properties; case studies include cantilever beam, pressure sensor, and accelerometer. |
| Textbook: | Gregory T. Kovacs,
Micromachined Transducers Sourcebook, 1st Edition, McGraw-Hill, 1998. Stephen D. Senturia, Microsystem Design, 1st Edition, Kluwer, 2000. Marc J. Madou, Fundamentals of Microfabrication, 2nd Edition, CRC Press, 2002. |
| Instructors: | Levent Degertekin (Fall 2003, Fall 2004), Peter Hesketh (Fall 2003, Fall 2004) |
Revised June 2004