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ME 6229 Introduction to Micro-Electro-Mechanical Systems
Offered Every Fall
| Credit Hours: |
2-3-3 |
| Prerequisites: |
Graduate standing in engineering or related discipline |
| Catalog Description: |
Principles of microfabrication for sensors and actuators. Lumped parameter analysis and computer-aided design; materials properties; case studies include cantilever beam, pressure sensor, and accelerometer. |
| Textbooks: |
Gregory T. Kovacs, Micromachined Transducers Sourcebook, 1st Edition, McGraw-Hill, 1998.
Stephen D. Senturia, Microsystem Design, 1st Edition, Kluwer, 2000.
Marc J. Madou, Fundamentals of Microfabrication, 2nd Edition, CRC Press, 2002. |
| Instructors: |
Levent Degertekin, Peter Hesketh |
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